Prohlížení Publikační činnost - 13113 dle autora "Kocián, Miroslav"
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Modeling of Evaporation of Thin Films Using DOE
Autor: Mach, Pavel; Kocián, Miroslav
(IEEE, 2006-05)Evaporation of thin films is widely spread technology. The goal of the work has been to optimize a process of fabrication of thin resistive Ni films. Mathematical models for calculation of thickness and resistance of the ...