Prohlížení Publikační činnost - 13113 dle autora "Rozkošný, T."
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Processing of Alumina Nano-films
Autor: Mach, P.; Rozkošný, T.
(IEEE, 2005-05)There are different technologies for processing of alumina thin films. It has been found that only some of them are usable for reliable and reproducible processing of nano-films with the thickness of 2 through 3 nm. Such ...