Prohlížení Publikační činnost - 13113 dle autora "Kolářová, Jana"

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    • Design of Experiments of AlN Reactive Sputtering 

      Autor: Mach, Pavel; Kolářová, Jana
      (IEEE, 2009-05)
      Reactive sputtering has been used for fabrication of AlN films. The process has been investigated in two levels of power of a generator, in two levels of the working pressure and in two levels of the working gas flow. The ...

    • Fabrication of AI203 and AIN thin films by reactive sputtering and its optimization using DOE 

      Autor: Mach, Pavel; Kolářová, Jana
      (IEEE, 2004-05)
      Thin films of Al2O3 and AlN have been fabricated by reactive sputtering using magnetron sputtering equipment. A mixture of Ar and O2 has been used for the fabrication of Al2O3 films, and a mixture of Ar and N2 has been ...