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Expanding the capability of the friction models currently used for simulating interaction of the wafer with the wafer holder, Expanding the capability of the friction models currently used for simulating interaction of the wafer with the wafer holder
; Vedoucí práce: MAE supervisor; Oponent práce: MAE opponent (České vysoké učení technické v Praze. Vypočetní a informační centrum.Czech Technical University in Prague. Computing and Information Centre., 2022-09-25)
Expanding the capability of the friction models currently used for simulating interaction of the wafer with the wafer holder