POŠTA, A. In-situ Raman spectroscopy characterization of SU-8 epoxy resin temperature dependent curing process. In: Proceedings of the International Student Scientific Conference Poster – 23/2019. 23rd International Student Conference on Electrical Engineering POSTER 2019, ČVUT FEL, Technická 2, Praha 6, 2019-05-23. Praha: ČVUT FEL, Středisko vědecko-technických informací, 2019. p. 1-3. 1. vol. 1. ISBN 978-80-01-06581-5. Available from: http://poseidon2.feld.cvut.cz/conf/poster/
The SU-8 is commonly used epoxy-based photoresist in manufacturing microfluidics and microelectromechanical systems (MEMS). In this paper, we investigated temperature dependent polymerization process of SU-8 by means of Raman spectroscopy. The Raman spectrum were recorded in-situ during the heating of the sample from 25 to 160 degrees of Celsius. From the collected spectrum we can observe increase in the intensity of 1183 cm-1 and 1108 cm-1 peaks corresponding to the asymmetric vibrations of C-O-C bond in polymer and decrease in the intensity of 930 cm-1 peak attributed to symmetric vibration of C-O-C bond in the polymer.
