In-situ Raman spectroscopy characterization of SU-8 epoxy resin temperature dependent curing process
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stať ve sborníkuconference paper
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Pošta A.
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The SU-8 is commonly used epoxy-based photoresist in manufacturing microfluidics and microelectromechanical systems (MEMS). In this paper, we investigated temperature dependent polymerization process of SU-8 by means of Raman spectroscopy. The Raman spectrum were recorded in-situ during the heating of the sample from 25 to 160 degrees of Celsius. From the collected spectrum we can observe increase in the intensity of 1183 cm-1 and 1108 cm-1 peaks corresponding to the asymmetric vibrations of C-O-C bond in polymer and decrease in the intensity of 930 cm-1 peak attributed to symmetric vibration of C-O-C bond in the polymer.
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