An Inkjet Printed ZnO Based Gas Senor on a Flexible High Temperature Substrate for NO2 Sensing

Abstract

In this work we demonstrate the realization of a simple and low cost NO 2 gas sensor on a flexible polymer substrate. The sensor was fabricated using inkjet printing and hydrothermal growth and consists of a printed interdigital structure on which a sensitive zinc oxide layer was grown. The chosen growing process does not require an additional seed layer, which allows to directly grow the zinc oxide layer on the substrate. Furthermore, the operating temperature was intrinsically achieved with an inkjet printed heater, which is located at the backside of the sensor.