Inkjet Seeded CVD-Grown Hydrogenated Diamond Gas Sensor Under UV-LED Illumination

Abstract

Hydrogen-terminated diamond gas sensors have been prepared by selective deposition of nanodiamond ink using direct inkjet printing on interdigital electrodes, followed by chemical vapor deposition growth of a nanoctrystalline diamond layer. The structure of the deposited layer was characterized and analyzed by scanning electron microscopy and Raman spectroscopy. The effect of ultraviolet light-emitting diode (UV-LED) illumination on the performance of the hydrogen-terminated diamond gas sensor with regard to reducing (NH3) and oxidizing (NO2) gases at various temperatures was studied. UV-LED illumination showed a short response/recovery time to NH3 and NO2 gases, 97 s / 153 s, and 72 s / 186 s, respectively.