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Low-resistance ohmic contacts on boron-doped {113} oriented homoepitaxial diamond layers
(Elsevier Science, 2022)Refractory metals (titanium, molybdenum, and zirconium) with a gold overlayer were used to form ohmic contacts on {113}-oriented boron doped diamond epitaxial layers (boron concentration ranging from 1019 to 1021 cm−3). ...