• HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE 

      Autor: Lofaj, František; Kabátová, Margita
      (České vysoké učení technické v PrazeCzech Technical University in Prague, 2020)
      The effects of substrate on the measurement of hardness (and indentation modulus) - penetration depth profiles were investigated on hybrid PVD-PECVD W-C:H coatings made with the additions of C2H2 or CH4 using High Power ...