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dc.contributor.authorTsyrenov , Dmitriy
dc.contributor.authorSemenov , Aleksandr
dc.contributor.authorSmirnyagina , Natalia
dc.date.accessioned2017-02-09T09:54:04Z
dc.date.available2017-02-09T09:54:04Z
dc.date.issued2015
dc.identifier.citationActa Polytechnica. 2015, vol. 55, no. 2, p. 136-139.
dc.identifier.issn1210-2709 (print)
dc.identifier.issn1805-2363 (online)
dc.identifier.urihttp://hdl.handle.net/10467/67185
dc.description.abstractA hybrid technology for forming composite TiN-Cu layers under the combined influence of a magnetron and low pressure arc discharges has been designed. The parameters of the plasma generator have been studied. The technological parameters for layer deposition in the conditions of coordinated action of the vacuum arc evaporator and the planar magnetron have been studied. This report describes the phase composition of TiN-Cu layers and the structure on fused silica substrates.en
dc.format.mimetypeapplication/pdf
dc.language.isoeng
dc.publisherČeské vysoké učení technické v Prazecs
dc.publisherCzech Technical University in Pragueen
dc.relation.ispartofseriesActa Polytechnica
dc.relation.urihttps://ojs.cvut.cz/ojs/index.php/ap/article/view/2227
dc.rightsCreative Commons Attribution 4.0 International Licenseen
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/
dc.titleMODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION
dc.typearticleen
dc.date.updated2017-02-09T09:54:04Z
dc.identifier.doi10.14311/AP.2015.55.0136
dc.rights.accessopenAccess
dc.type.statusPeer-reviewed
dc.type.versionpublishedVersion


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Creative Commons Attribution 4.0 International License
Kromě případů, kde je uvedeno jinak, licence tohoto záznamu je Creative Commons Attribution 4.0 International License