Browsing Acta Polytechnica. 2015, vol. 55, no. 2 by Author "Tsyrenov , Dmitriy"
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MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION
Author: Tsyrenov , Dmitriy; Semenov , Aleksandr; Smirnyagina , Natalia
(České vysoké učení technické v PrazeCzech Technical University in Prague, 2015)A hybrid technology for forming composite TiN-Cu layers under the combined influence of a magnetron and low pressure arc discharges has been designed. The parameters of the plasma generator have been studied. The technological ...