Browsing Acta Polytechnica. 2015, vol. 55, no. 2 by Author "Tsyrenov , Dmitriy"
MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOWPRESSURE ARC DISCHARGE FOR COMPOSITE TINCU LAYERS FORMATION Author: Tsyrenov , Dmitriy; Semenov , Aleksandr; Smirnyagina , Natalia
(České vysoké učení technické v PrazeCzech Technical University in Prague, 2015)A hybrid technology for forming composite TiN-Cu layers under the combined influence of a magnetron and low pressure arc discharges has been designed. The parameters of the plasma generator have been studied. The technological ...