Browsing Acta Polytechnica. 2013, vol. 53, no. 2 by Subject "magnetron sputtering"
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Growth and Physical Structure of Amorphous Boron Carbide Deposited by Magnetron Sputtering on a Silicon Substrate with a Titanium Interlayer
(České vysoké učení technické v PrazeCzech Technical University in Prague, 2013)Multilayer amorphous boron carbide coatings were produced by radiofrequency magnetron sputtering on silicon substrates. To improve the adhesion, titanium interlayers with different thickness were interposed between the ...