Browsing Acta Polytechnica. 2013, vol. 53, no. 2 by Author "62885558-55ca-4632-8abc-740c1394c93a"
Positioning of the Precursor Gas Inlet in an Atmospheric Dielectric Barrier Reactor and its Effect on the Quality of Deposited TiOx Thin Film Surface Author: Píchal , Jan; Klenko , Julia
(České vysoké učení technické v PrazeCzech Technical University in Prague, 2013)Thin film technology has become pervasive in many applications in recent years, but it remains difficult to select the best deposition technique. A further consideration is that, due to ecological demands, we are forced ...