Prohlížení Acta Polytechnica dle předmětu "magnetron sputtering"

Zobrazují se záznamy 1-2 z 2

    • Growth and Physical Structure of Amorphous Boron Carbide Deposited by Magnetron Sputtering on a Silicon Substrate with a Titanium Interlayer 

      Autor: Caniello , Roberto; Vassallo , Espedito; Cremona , Anna; Grosso , Giovanni; Dellasega , David; Canetti , Maurizio; Miorin , Enrico
      (České vysoké učení technické v PrazeCzech Technical University in Prague, 2013)
      Multilayer amorphous boron carbide coatings were produced by radiofrequency magnetron sputtering on silicon substrates. To improve the adhesion, titanium interlayers with different thickness were interposed between the ...

    • MAGNETRON SPUTTERING WITH HOT SOLID TARGET: THERMAL PROCESSES AND EROSION 

      Autor: Borduleva Olegovna, Alena; Bleykher Alekseevna, Galina; Sidelev Vladimirovich, Dmitrii; Krivobokov Pavlovich, Valeriy
      (České vysoké učení technické v PrazeCzech Technical University in Prague, 2016)
      This work focuses on erosion and thermal processes taking place on the surface of the titanium target in magnetron sputtering. The study was carried out using magnetron sputtering systems (MSS) with different thermal ...