Zobrazit minimální záznam



dc.contributor.authorDomonkos , Mária
dc.contributor.authorIžák , Tibor
dc.contributor.authorŠtolcová , Lucie
dc.contributor.authorProška , Jan
dc.contributor.authorDemo , Pavel
dc.contributor.authorKromka , Alexander
dc.date.accessioned2017-02-09T09:33:33Z
dc.date.available2017-02-09T09:33:33Z
dc.date.issued2014
dc.identifier.citationActa Polytechnica. 2014, vol. 54, no. 5, p. 320-324.
dc.identifier.issn1210-2709 (print)
dc.identifier.issn1805-2363 (online)
dc.identifier.urihttp://hdl.handle.net/10467/67157
dc.description.abstractIn this study, the structuring of micro- and nanocrystalline diamond thin films is demonstrated. The structuring of the diamond films is performed using the technique of microsphere lithography followed by reactive ion etching. Specifically, this paper presents a four-step fabrication process: diamond deposition (microwave plasma assisted chemical vapor deposition), mask preparation (by the standard Langmuir-Blodgett method), mask modification and diamond etching. A self-assembled monolayer of monodisperse polystyrene (PS) microspheres with close-packed ordering is used as the primary template. Then the PS microspheres and the diamond films are processed in capacitively coupled radiofrequency plasma  using different plasma chemistries. This fabrication method illustrates the preparation of large arrays of periodic and homogeneous hillock-like structures. The surface morphology of processed diamond films is characterized by scanning electron microscopy and atomic force microscope. The potential applications of such diamond structures in various fields of nanotechnology are also briefly discussed.en
dc.format.mimetypeapplication/pdf
dc.language.isoeng
dc.publisherČeské vysoké učení technické v Prazecs
dc.publisherCzech Technical University in Pragueen
dc.relation.ispartofseriesActa Polytechnica
dc.relation.urihttps://ojs.cvut.cz/ojs/index.php/ap/article/view/2147
dc.rightsCreative Commons Attribution 4.0 International Licenseen
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/
dc.titleSTRUCTURING OF DIAMOND FILMS USING MICROSPHERE LITHOGRAPHY
dc.typearticleen
dc.date.updated2017-02-09T09:33:33Z
dc.identifier.doi10.14311/AP.2014.54.0320
dc.rights.accessopenAccess
dc.type.statusPeer-reviewed
dc.type.versionpublishedVersion


Soubory tohoto záznamu



Tento záznam se objevuje v následujících kolekcích

Zobrazit minimální záznam

Creative Commons Attribution 4.0 International License
Kromě případů, kde je uvedeno jinak, licence tohoto záznamu je Creative Commons Attribution 4.0 International License