• MAGNETRON SPUTTERING WITH HOT SOLID TARGET: THERMAL PROCESSES AND EROSION 

      Autor: Borduleva Olegovna, Alena; Bleykher Alekseevna, Galina; Sidelev Vladimirovich, Dmitrii; Krivobokov Pavlovich, Valeriy
      (České vysoké učení technické v PrazeCzech Technical University in Prague, 2016)
      This work focuses on erosion and thermal processes taking place on the surface of the titanium target in magnetron sputtering. The study was carried out using magnetron sputtering systems (MSS) with different thermal ...