Browsing Acta Polytechnica. 2021, vol. 61, no.6 by Author "Cheung, Rebecca"
Author: Al-mashaal, Asaad K. Edaan; Cheung, Rebecca
(České vysoké učení technické v PrazeCzech Technical University in Prague, 2021)Wet etching is a critical fabrication step for the mass production of micro and nanoelectronic devices. However, when an extremely corrosive acid such as hydrofluoric (HF) acid are used during etching, an undesirable damage ...