Browsing by Author "Kabátová, Margita"
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HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE
Author: Lofaj, František; Kabátová, Margita
(České vysoké učení technické v PrazeCzech Technical University in Prague, 2020)The effects of substrate on the measurement of hardness (and indentation modulus) - penetration depth profiles were investigated on hybrid PVD-PECVD W-C:H coatings made with the additions of C2H2 or CH4 using High Power ...